Induced resonance comb drive scanner

Details Induced resonance comb drive scanner Induced resonance comb drive scanner

2011-07-26

2011-07-26

Cherry, Euncha (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

Reexamination Certificate

active

07986449

ABSTRACT:
Briefly, in accordance with one or more embodiments, a MEMS based scanning platform is arranged to have increased efficiency by driving a first frame of the scanning platform directly by applying a drive voltage to a set of comb fingers disposed on the first frame to cause the first frame to oscillate via torsional rotation of a first flexure and by driving a second frame of the scanning platform indirectly via mechanical coupling of the second frame with the first frame via a second flexure, wherein damping losses and work capacity are such that the operation of the scanning mirror is more efficient than if the set of comb fingers were disposed on the second frame and directly driven by the drive voltage. The scanning platform may comprise a 1D scanner, a 2D scanner, or a multiple-dimensional scanner.

REFERENCES:
patent: 7071594 (2006-07-01), Yan et al.
patent: 2004/0141894 (2004-07-01), Mizuno et al.
Kurth, Steffen et al., “A Novel 24 kHz Resonant Scanner for High Resolution Laser Display”,MOEMS Display and Imaging Systems III, Proceedings of SPIE,vol. 5721 2005 , 23-33.
Yoda, M. et al., “A MEMS 1-D Optical Scanner for Laser Projection Display using Self-Assembled Veritical Combs and Scan-Angle Magnifying Mechanism”,Conference on Solid State Sensors, Actuators and MicrosystemsJun. 5, 2005 , 968-971.
Kwon, Sunghoon et al., “Vertical Comb Drive Based 2-D Gimbaled Micromirrors with Large Static Rotation by Backside Island Isolation”,IEEE Journal of Selected Topics in Quantum Electronics, May-Jun. 2004, vol. 10, Issue 3 May 2004 , 498-504.
Microvision, Inc., “International Search Report and Written Opinion”, PCT Application No. PCT/US2009/040702, filed Apr. 15, 2009, claims priority to present U.S. Appl. No. 12/122,223, filed Dec. 2, 2009.

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