Hidden micromirror support structure

Details Hidden micromirror support structure Hidden micromirror support structure

2011-04-12

2011-04-12

Choi, William C (Department: 2873)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C204S192270, C216S024000

Reexamination Certificate

active

07924489

ABSTRACT:
Methods and apparatus for use with a micromirror element includes a micromirror a micromirror having a substantially flat outer surface disposed outwardly from a support structure that is operable to at least partially support the micromirror. The support structure includes at least one layer overlying at least two discrete planes that are both substantially parallel to the outer surface of the micromirror. In one particular embodiment, the support structure includes annular-shaped sidewalls that encapsulate a photoresist plug.

REFERENCES:
patent: 5631782 (1997-05-01), Smith et al.
patent: 5650881 (1997-07-01), Hornbeck
patent: 7529015 (2009-05-01), Rothenbury
patent: 7630114 (2009-12-01), Wang et al.

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