Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2007-04-24
2007-04-24
Amari, Alessandro (Department: 2872)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
Reexamination Certificate
active
10751034
ABSTRACT:
A method and apparatus for fabricating a MEMS apparatus having a device layer with an optical surface that is supported by a pedestal on a planar support layer that is suspended for movement with respect to a base support by hinge elements disposed in a different plane from the planar support layer. The surface area of the optical surface is maximized with respect to the base support to optimized the fill factor of the optical surface and afford a high passband. The height of the pedestal is selected to position the device layer sufficiently above the base support to afford an unobstructed predetermined angular rotation about each axis. The hinges may be made of thin-film material, fabricated by way of surface micromachining techniques. The hinges are disposed underneath the device layer enabling the optical surface to be maximized so that the entire surface becomes usable (e.g., for optical beam manipulation). MEMS devices afford an array of MEMS mirrors with a high optical fill factor and high passband. Further, use of both bulk and surface micromachining techniques gives a MEMS device with a large and flat mirror and flexible hinges capable of a substantial rotational range at modest electrostatic drive voltages.
REFERENCES:
patent: 4360182 (1982-11-01), Titus
patent: 5239361 (1993-08-01), Burch
patent: 5497262 (1996-03-01), Kaeriyama
patent: 5661591 (1997-08-01), Lin
patent: 5696619 (1997-12-01), Knipe et al.
patent: 5920417 (1999-07-01), Johnson
patent: 6028689 (2000-02-01), Michalicek et al.
patent: 6201629 (2001-03-01), McClelland et al.
patent: 6275325 (2001-08-01), Sinclair
patent: 6292600 (2001-09-01), Goldstein et al.
patent: 6480320 (2002-11-01), Nasiri
patent: 6512625 (2003-01-01), Mei et al.
patent: 6533947 (2003-03-01), Nasiri et al.
patent: 6585383 (2003-07-01), Helkey
patent: 6600851 (2003-07-01), Aksyuk et al.
patent: 6612706 (2003-09-01), Helkey
patent: 6934439 (2005-08-01), Mala et al.
patent: 2001/0019445 (2001-09-01), Ueda
patent: 2002/0034024 (2002-03-01), Orcutt et al.
patent: 2005/0024707 (2005-02-01), Bernstein et al.
patent: 20000133799 (2000-11-01), None
patent: WO 01/94253 (2001-12-01), None
patent: WO 2003/102631 (2003-12-01), None
Supplementary European Search Report dated Dec. 21, 2005 corresponding to the related European Patent Application No. 03756196.6.
Tuantranont, et al., “Bulk-Etched Surface Micromachined And Flip-Chip Integrated Micromirror Array For Infrared Applications”; 2000 IEEE/LEOS International Conference on Optical MEMS, IEEE Catelog #; 00EX399, Sheraton Kauai, Resort, Kauai, Hawaii Aug. 21-24 2000, pp. 71-72.
Davis Joseph E.
Van Drieenhuizen Bert P.
Amari Alessandro
Capella Photonics, Inc.
DLA Piper (US) LLP
LandOfFree
High fill-factor bulk silicon mirrors does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with High fill-factor bulk silicon mirrors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High fill-factor bulk silicon mirrors will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3796795