Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2006-04-25
2006-04-25
Cherry, Euncha P. (Department: 2872)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
C359S578000
Reexamination Certificate
active
07034975
ABSTRACT:
An interferometric micro electro-mechanical switching (MEMS) device includes an interferometer. The interferometer includes an optical cavity having a depth and formed between an inner mirror assembly and an outer mirror assembly. The MEMS device further includes an actuator coupled to the interferometer. The actuator includes an electrode gap having a depth and formed between an inner conductor and an outer conductor. In one particular embodiment, the depth of the optical cavity and the depth of the electrode gap are capable of being selected substantially independently of one another.
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Islam Mohammed N.
Kuditcher Amos
Baker & Botts L.L.P.
Cheetah Onmi, LLC
Cherry Euncha P.
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