Flexure design for a fast steering scanning mirror

Optical: systems and elements – Deflection using a moving element – By moving a reflective element

Patent

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Details

359199, 248485, G02B 2608

Patent

active

055506690

ABSTRACT:
A support for a fast steering/scanning mirror including a base and two horizontal flexures arranged generally parallel to each other. Each of the flexures may include two end brackets which are secured to the base and a middle bracket between the end brackets which is secured to the mirror. The support may also include a vertical flexure secured to the base at one end and pivotally secured with adhesive to the mirror between the two horizontal flexures at another end. The support may have a first natural vibrational mode with respect to rotation in each of two perpendicular axes that is less than 30 Hertz, a second natural vibrational mode with respect to rotation in each of the two perpendicular axes that is at least 2,000 Hertz, and a natural vibrational mode with respect to rotation in a third axis which is perpendicular to said two axes that is at least 2,000 Hertz. The vertical flexure may include at least two plates which are orthogonally arranged on the same axis. The horizontal flexures may include a mustache-shaped edge having a straight portion near a middle of the horizontal flexure which is joined by a slanted portion at each end which is joined at each end by a curved portion. The horizontal flexures may also include at least one folded edged opposite said mustache-shaped edge.

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