Method of making a deformable grating apparatus for modulating a

Method of making magnetically driven light modulators

Method of micromachining a scanning torsion mirror

Method of passivating a micromechanical device within a hermetic

Methods and devices for inhibiting tilting of a movable...

Micro mirror unit and its manufacturing process, and optical...

Micro-actuation element provided with torsion bars

Micro-actuation element provided with torsion bars

Micro-electro-mechanical device having improved torsional...

Micro-electro-mechanical-system micromirrors for high fill...

Micro-electromechanical (MEM) optical resonator and method

Micro-electromechanical microshutter array

Micro-machined mirror using tethered elements

Micro-mechanical beam protective support structures wherein...

Micro-mirror and a method for fabricating the same

Micro-mirror and a method for fabricating the same

Micro-mirror device

Micro-mirror device including dielectrophoretic liquid

Micro-mirror device including dielectrophoretic liquid

Micro-mirror device with light angle amplification