Micro angular rate sensor
Micro electromechanical switch for detecting acceleration or...
Micro inertia sensor and method of manufacturing the same
Micro structure for vertical displacement detection and...
Micro-accelerometer
Micro-accelerometer with capacitive resonator
Micro-beam motion sensor
Micro-electro-mechanical gyroscope
Micro-electro-mechanical gyroscope having electrically...
Micro-electro-mechanical sensor with force feedback loop
Micro-electro-mechanical structure having electrically...
Micro-electro-mechanical systems resonant optical gyroscope
Micro-electro-mechanical systems ultra-sensitive accelerometer
Micro-electro-mechanical systems ultra-sensitive...
Micro-electromechanical structure with improved...
Micro-machined accelerometer
Micro-machined accelerometer
Micro-machined accelerometer array with shield plane
Micro-machined accelerometer with composite material springs
Micro-machined accelerometer with improved transfer...