Micro-electromechanical structure with improved...

Details Micro-electromechanical structure with improved... Micro-electromechanical structure with improved...

2008-01-29

2008-01-29

Larkin, Daniel S. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514350, C257S734000

Reexamination Certificate

active

07322242

ABSTRACT:
In a micro-electromechanical structure, a rotor has a centroidal axis and includes a suspended structure which carries mobile electrodes. A stator carries fixed electrodes facing the mobile electrodes. The suspended structure is connected to a rotor-anchoring region via elastic elements. The stator includes at least one stator element, which carries a plurality of fixed electrodes and is fixed to a stator-anchoring region. One of the rotor-anchoring regions and stator-anchoring regions extends along the centroidal axis and at least another of the rotor-anchoring regions and stator-anchoring regions extends in the proximity of the centroidal axis.

REFERENCES:
patent: 5565625 (1996-10-01), Howe et al.
patent: 5756901 (1998-05-01), Kurle et al.
patent: 5780740 (1998-07-01), Lee et al.
patent: 5983721 (1999-11-01), Sulzberger et al.
patent: 6508124 (2003-01-01), Zerbini et al.
patent: 1 083 144 (2001-03-01), None
patent: 1 083 430 (2001-03-01), None
patent: WO 2004/010150 (2004-01-01), None

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