Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1990-06-01
1992-08-04
Chapman, John E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
73517B, G01P 15125
Patent
active
051348810
ABSTRACT:
A transducer fabricated by micro-machining includes E-shaped leaf springs suspending a mass from a support. The transducer is formed by chemical etching through openings of opposite faces of a silicon wafer on which etch stop layer patterns are diffused. Sense and force conductive patterns are diffused onto opposite faces of the suspended mass. The legs of the E-shaped leaf springs are formed of a composite of a polysilicon base layer, a silicon dioxide insulating layer and a gold conducting layer. The thickness of such layers are selected to minimize bowing effects of the spring legs due to materials of different coefficients of thermal expansion. The spring-mass-support structure is sandwiched between opposite plates having corresponding force and conductive patterns which face such patterns on the suspended mass.
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patent: 4441366 (1984-04-01), Hanson
patent: 4597003 (1986-06-01), Aine et al.
patent: 4873868 (1989-10-01), Pierre et al.
patent: 4926689 (1990-05-01), Hanson
patent: 4955233 (1990-09-01), Hanson
Henrion W. S.
Ip Matthew W.
Chapman John E.
Triton Technologies, Inc.
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