Micromachined acceleration and coriolis sensor
Micromachined apparatus utilizing box suspensions
Micromachined apparatus with drive/sensing fingers in...
Micromachined apparatus with split vibratory masses
Micromachined device with rotationally vibrated masses
Micromachined device with rotationally vibrated masses
Micromachined devices
Micromachined devices
Micromachined devices and connections over a substrate
Micromachined devices with anti-levitation devices
Micromachined devices with apertures
Micromachined devices with stop members
Micromachined double tuning-fork gyrometer with detection in...
Micromachined double tuning-fork gyrometer with detection in...
Micromachined gyros
Micromachined gyros
Micromachined gyroscope
Micromachined gyroscopic sensor with detection in the plane...
Micromachined inertial sensor for measuring rotational...
Micromachined members coupled for relative rotation by torsion b