Micromachined double tuning-fork gyrometer with detection in...

Details Micromachined double tuning-fork gyrometer with detection in... Micromachined double tuning-fork gyrometer with detection in...

2007-10-23

2007-10-23

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504160

Reexamination Certificate

active

10929398

ABSTRACT:
The invention relates to a gyrometer based on a vibrating structure, produced by micromachining in a thin planar wafer. It comprises four moving assemblies placed at the vertices of a virtual rectangle, each moving assembly being coupled to two moving assemblies located at neighboring vertices via a coupling structure and comprising an inertial first moving element connected to the coupling structure and intended to vibrate in two orthogonal directions in the plane of the wafer, namely an excitation direction and a detection direction, and a second moving element intended to vibrate in the detection direction and connected, on one side, to the first moving element and, on the other side, to anchoring zones via linking means.

REFERENCES:
patent: 5706252 (1998-01-01), Le Verrier et al.
patent: 6647759 (2003-11-01), Leverrier et al.
patent: 6691571 (2004-02-01), Willig et al.
patent: 6705164 (2004-03-01), Willig et al.
patent: 6877374 (2005-04-01), Geen

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