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Method of making an X-Y axis dual-mass tuning fork gyroscope...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Method of operating micromachined members coupled for...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Method of simultaneously and directly generating an angular...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Method of stimulating an oscillator control for capacitive...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Methods and apparatus for a MEMS gyro sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Methods and systems for actively controlling movement within...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Methods and systems for controlling movement within MEMS...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Methods and systems for decelerating proof mass movements...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Methods and systems for simultaneously fabricating...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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MHD sensor for measuring microradian angular rates and...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Micro angular rate sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Micro inertia sensor and method of manufacturing the same

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Micro-beam motion sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Micro-electro-mechanical gyroscope having electrically...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Micro-electro-mechanical structure having electrically...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Micro-machined accelerometer with improved transfer...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Micro-machined angle-measuring gyroscope

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Micro-machined multi-sensor providing 1-axis of acceleration...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Micro-machined multi-sensor providing 2-axes of acceleration...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Micro-machined vibrating structure and associated...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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