Micromechanical accelerometer
Micromechanical accelerometer for automotive applications
Micromechanical accelerometer having a peripherally suspended pr
Micromechanical anchor structure
Micromechanical apparatus with limited actuation bandwidth
Micromechanical capacitive acceleration sensor
Micromechanical capacitive acceleration sensor
Micromechanical comb structure
Micromechanical component
Micromechanical component
Micromechanical component
Micromechanical component and method for producing the...
Micromechanical component comprising an oscillating body
Micromechanical component having closely spaced apart anchoring
Micromechanical device
Micromechanical device
Micromechanical sensor
Micromechanical sensor and method for the manufacture thereof
Micromechanical sensor including a single-crystal silicon suppor
Micromechanical sensor with a guard band electrode