Micromechanical sensor

Details Micromechanical sensor Micromechanical sensor

1997-02-04

1998-06-09

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73 3106, 7351421, 32420713, G01P 15125, G01R 3302, G01N 2712

Patent

active

057637822

ABSTRACT:
A micromechanical sensor has a plurality of sensing elements (14a-14d) which are supported at respective support regions (12a-12d). A first set of the sensing elements defines the sensing gap. In one arrangement this is defined by sensing elements supported by adjacent support regions. In another embodiment the sensing gap is defined between one sensing element and a reference beam formed by connection of the return legs of two diametrically opposed sensing elements. The sensing elements are substantially similar one to another and each sensing element comprises an outgoing elongate leg extending away from its associated support region and a return leg substantially parallel to the outgoing leg extending towards the support region. By providing sensing elements which are substantially similar in shape and arranged in this way, the effects of thin film stress are minimized.

REFERENCES:
patent: 3335338 (1967-08-01), Lepselter
patent: 4091680 (1978-05-01), Block
patent: 4653326 (1987-03-01), Danel et al.
patent: 4668865 (1987-05-01), Gimzewski et al.
patent: 4674319 (1987-06-01), Muller et al.
patent: 4783237 (1988-11-01), Aine
patent: 4806755 (1989-02-01), Duerig et al.
patent: 4906840 (1990-03-01), Zdeblick et al.
patent: 4912822 (1990-04-01), Zdeblick et al.
patent: 4920800 (1990-05-01), Boura
patent: 4953387 (1990-09-01), Johnson et al.
patent: 5025346 (1991-06-01), Tang et al.
patent: 5116462 (1992-05-01), Bartha et al.
D.F. Moore et al "Microfabrication of freestanding microstructures", Microscircuit Engineering Journal (1993). M.I. Lutwyche and D.F. Moore, Suspended Structures made by electron beam lithography, Micromech. Microeng. 1 (1991) pp. 237-246.
Roger T. Howe et al, "Silicon micromechanics: sensors and actuators on a chip", IEEE Spectrum, Jul. 1990, pp. 29-35.
A.P. Pisano, "Resonant-structure Micromotors Historical Perspective and Analysis", Sensor and Actuators, 20 (1989) pp. 83-89.
U. Dibbern, "A Substrate for Thin-film Gas Sensor in Microelectronic Technology", Sensor and Actuators B, 2 (1990) pp. 63-70.
D.F. Moore et al, "Microfabrication of Freestanding Structures", Microcircuit Engineering 92 Erlangen Sep. 21-24 1992.
Applied Physics Letters, vol. 58, No. 7, Jan. 1991, New York US pp. 100-102 T. W. Kenny et al "Micromachined silicon tunnel sensor for motion detection".
Journal of Vacuum Science and Technology: Part vol. 8, No. 4, Jul. 1990, New York US, pp. 3606-3613 D.W. Burns; H.Guckel "Thin films for micromechanical sensors".
Journal of Micromechanical Engineering vol. 1, pp. 113-125 G. Stem "Resonant silicon sensors".
Journal of Microscopy vol. 152, No. 2 Nov. 1988, pp. 585-596, C.Schneiket et al "scanning tunneling engineering et al" Scanning tunneling engineering.

Affiliated with

Also associated with

Rating

Micromechanical sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micromechanical sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromechanical sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2202121