Microelectronic integrated sensor and method for producing the s
Microfabricated linear accelerometer
Micromachined accelerometer
Micromachined accelerometer gyroscope
Micromachined accelerometer with electrostatic return
Micromachined capacitive lateral accelerometer device and...
Micromachined comb capacitive accelerometer
Micromachined comb capacitive accelerometer
Micromachined comb capacitive accelerometer
Micromachined device with enhanced dimensional control
Micromachined device with enhanced dimensional control
Micromachined low frequency rocking accelerometer with...
Micromachined measuring cell with arm supported sensor
Micromachined microaccelerometer for measuring acceleration alon
Micromachined sensors
Micromachined shock sensor
Micromachined silicon gyro using tuned accelerometer
Micromachined Z-axis vibratory rate gyroscope
Micromechanical acceleration or coriolis rotation-rate sensor
Micromechanical acceleration sensor