Microelectronic integrated sensor and method for producing the s

Details Microelectronic integrated sensor and method for producing the s Microelectronic integrated sensor and method for producing the s

1996-09-30

1999-03-23

Williams, Hezron

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 1500

Patent

active

058862617

ABSTRACT:
A microelectronic integrate sensor is formed with a cantilever. For the purpose of ensuring a system which is especially invulnerable to mechanical strains during production, the cantilever is placed freely movably on a support, and motion limiters are provided on the edge. The invention also provides for the formation of nitride pillars for supporting the upper layers, in order to further increase the stability. A corresponding production process for producing the sensor is disclosed as well.

REFERENCES:
patent: 4882933 (1989-11-01), Petersen et al.
patent: 5510290 (1996-04-01), Kwon
patent: 5604313 (1997-02-01), Cahill et al.
patent: 5611940 (1997-03-01), Zettler

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