Micromachined measuring cell with arm supported sensor

Details Micromachined measuring cell with arm supported sensor Micromachined measuring cell with arm supported sensor

1995-01-27

1996-09-03

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351416, 73493, 437180, H01L 2100

Patent

active

055512941

ABSTRACT:
A micromachined measuring cell is adapted to be mounted on a support and has a measuring sensor (121) and an assembly structure (120) distinct from one another and associated with each other by a connecting arm (128). At least one part element (103b) of the assembly structure, one part (133) of the connecting arm and one part (103a) of the sensor (121) are produced as one single piece. The assembly structure (120) of this measuring cell is preferably in the shape of a frame surrounding the sensor (121).

REFERENCES:
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patent: 4930042 (1990-05-01), Wiegand et al.
patent: 5000817 (1991-03-01), Aine
patent: 5006487 (1991-04-01), Stokes
patent: 5134881 (1992-08-01), Henrion et al.
patent: 5181156 (1993-01-01), Gutteridge et al.
patent: 5352918 (1994-10-01), Thomas et al.

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