Micromachined microaccelerometer for measuring acceleration alon

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

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361280, G01P 1513

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active

053578031

ABSTRACT:
The present invention relates to a microaccelerometer employing a single free-mass and capable of measuring acceleration along three coordinate axes, and a process for fabricating through micromachining and microelectronic techniques a microaccelerometer employing a free-mass. A microaccelerometer preform is constructed by chemically coating and etching a silicon wafer to form a support member and a free-mass surrounded by the member. The free-mass is movable with respect to, but constrained by the silicon support member. Acceleration measurements are obtained by circuits which sense changes in the position of the free-mass with respect to an equilibrium position, induced by a change in the rate of acceleration of the accelerometer, and the electromagnetic force required to restore the free-mass to its equilibrium position.

REFERENCES:
patent: 3742767 (1973-07-01), Bernard et al.
patent: 4068533 (1978-01-01), Ferriss
patent: 4352061 (1982-09-01), Matrone
patent: 4393710 (1983-07-01), Bernard
patent: 4706374 (1987-11-01), Murakami
patent: 4736629 (1988-04-01), Cole
patent: 4893509 (1990-01-01), MacIver et al.
patent: 4901570 (1990-02-01), Chang et al.
patent: 4922756 (1990-05-01), Henrion
patent: 4932261 (1990-06-01), Henrion
patent: 4945765 (1990-08-01), Rosxhart
G. Bomchil, et al. "Formation and Oxidation of Porous Silicon for Silicon on Insulator Technologies" Energy Beam-Solid Interactions and Transient Thermal Processing, 1985, pp. 463-474.
D. W. Satchell, et al. "Silicon Microengineering for Accelerometers", Rec. of the Int. Conf. on the Mech. Technol. of Inertial Devices, 1987, pp. 191-193.
Richard S. Muller, "Heat and Strain-Sensitive Thin-Film Transducers", Sensors and Actuators, vol. 4, pp. 173-182, Dec. 1983.
L. M. Roylance, et al., "A Batch-Fabricated Silicon Accelerometer", IEEE Trans. Electron Devices, vol. ED-26, No. 12, pp. 1911-1917, Dec. 1979.
K. E. Petersen, "Silicon as a Mechanical Material", Proc. IEEE, vol. 70, No. 5, pp. 420-457, May 1982.
M. E. Motamedi, "Acoustic Accelerometers", IEEE Trans. Ultrason. Ferroelec. Freq. Contr., vol. UFFC-34, No. 2, pp. 237-242, Mar. 1987.
Pau-Ling Chem, et al., "Integrated Silicon Microbeam PI-FET Accelerometer", IEEE Trans. Electron Devices, vol. ED-29, No. 1, pp. 27-33, Jan. 1982.
F. Rudolf, et al., "Silicon Microaccelerometer", Transducers '87, Rec. of the 4th Int. Conf. on Solid-State Sensors and Actuators, 1987, pp. 395-398.

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