Micro-electromechanical sensor

Micro-machined pressure sensor with polymer diaphragm

Micro-machined pressure sensor with polymer diaphragm

Micro-mechanical capacitive inductive sensor for detection...

Micro-mechanical capacitive inductive sensor for wireless...

Micro-mechanical capacitive inductive sensor for wireless...

Microballoon tagged materials

Microcomputerized force transducer

Microdevice for sensing a force

Microelectromechanical correlation device and method

Microelectromechanical system pressure sensor and method for...

Microelectromechanical system pressure sensor and method for...

Microelectromechanical system pressure sensor and method for...

Microfabricated implantable wireless pressure sensor for use...

Microfluidic measuring tool to measure through-silicon via...

Micromachined acoustic transducer and method of operating...

Micromachined capacitive RF pressure sensor

Micromachined differential pressure transducers

Micromachined diffractive pressure sensor system

Micromachined integrated pressure sensor with oxide polysilicon