Microelectromechanical system pressure sensor and method for...

Measuring and testing – Fluid pressure gauge – Mounting and connection

Reexamination Certificate

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Reexamination Certificate

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11495317

ABSTRACT:
According to some embodiments, an apparatus includes a substrate that defines a plane. The apparatus also includes a first conducting plate that is substantially normal to the substrate and a second conducting plate that is (i) substantially normal to the substrate and (ii) deformable in response to a pressure.

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