Measuring and testing – Fluid pressure gauge – Electrical
Reexamination Certificate
2008-07-22
2008-07-22
Lefkowitz, Edward (Department: 2855)
Measuring and testing
Fluid pressure gauge
Electrical
C073S753000, C438S053000
Reexamination Certificate
active
07401525
ABSTRACT:
A piezoresistive pressure and/or strain sensor micro-machined primarily from plastic and/or glass. In one illustrative embodiment, the piezoresistive pressure sensor is formed on a polymer substrate. A first selectively implanted region is provided in the polymer substrate to create a piezoresistive region in the polymer substrate. A second selectively implanted region is then provided in at least part of the first selectively implanted region to modulate the electrical conductivity of the first selectively implanted region. The illustrative sensor may be selectively implanted with, for example, nitrogen to create the piezoresistive region, and boron to modulate the electrical conductivity of the piezoresistive region. Phosphorus or any other suitable material may also be used to modulate the electrical conductivity of the piezoresistive region, as desired. The piezoresistive pressure/strain sensor may be formed from a single substrate, or two or more substrates, and the resulting pressure/strain sensor may be mounted in a plastic package, if desired.
REFERENCES:
patent: 4808336 (1989-02-01), Rubner et al.
patent: 5262195 (1993-11-01), Moss et al.
patent: 5309767 (1994-05-01), Parmar et al.
patent: 5505093 (1996-04-01), Giedd et al.
patent: 6079277 (2000-06-01), Chung
patent: 6109113 (2000-08-01), Chavan et al.
patent: 6155120 (2000-12-01), Taylor
patent: 6262195 (2001-07-01), Dall'Occo et al.
patent: 6263672 (2001-07-01), Roby et al.
patent: 6263739 (2001-07-01), Seefried et al.
patent: 6288181 (2001-09-01), Ford et al.
patent: 6607632 (2003-08-01), McDonnell et al.
patent: 2003/0089182 (2003-05-01), Thaysen et al.
patent: 19832681 (2000-02-01), None
patent: 2141548 (1984-12-01), None
Lennart Lofdahl and Mohammed Gad-el-Hak, MEMS-based pressure and shear stress sensors for turbulent flows, 1999 IOP Publishing Ltd., pp. 667-668 See Figures 2.
Forlani, “Thick-Film Sensors for Automotive Electronics,” 4thEuropean Hybrid Microelectronics Conference, pp. 165-177, 1983.
Frazier et al., “Mechanical and Piezoresistive Properties of Graphite-Filled Polymide Thin Films,” Materials Research Society Proceedings, vol. 278, 7 pages, 1992.
Giedd et al., “Temperature Sensitive Ion-Implanted Polymer Films,” Nuclear Instruments and Methods in Physics Research B59/60, pp. 1253-1256, 1991.
Harsanyi, “Polymer Thick-Film Technology: a Possibility to Obtain Very Low Cost Pressure Sensors?”, Sensors and Actuators, pp. 853-857, 1991.
Cobianu Cornel P.
Gologanu Mihai
Pavelescu Ioan
Serban Bogdan Catalin
Fredrick Kris T.
Honeywell International , Inc.
Jenkins Jermaine
Lefkowitz Edward
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