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Wafer transport device

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Wafer transport module with rotatable and horizontally extendabl

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Wafer transport pod with linear door opening mechanism

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Wafer transport system

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Wafer tray and ceramic blade for semiconductor processing appara

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Work-piece processing system

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Workpiece accumulating and transporting apparatus

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Workpiece lifting and holding apparatus

Material or article handling – Apparatus for moving material between zones having different... – Including serially arranged valves in path having a vertical...
Patent

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Workpiece sorter operating with modular bare workpiece...

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Reexamination Certificate

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Worm conveyor for bulk material

Material or article handling – Apparatus for moving material between zones having different... – Including screw conveyor
Patent

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