Workpiece sorter operating with modular bare workpiece...

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type

Reexamination Certificate

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Details

C414S331050, C414S938000

Reexamination Certificate

active

06848876

ABSTRACT:
A reticle management system is disclosed including a sorter coupled to one or more stockers that allow a customized configuration of the overall reticle management system. The stockers may be bare reticle stockers, closed container reticle stockers, or both. In embodiments of the present invention, the reticle management system includes between one and six individual bare reticle stockers and/or closed container stockers for storing reticles affixed to a reticle sorter. The sorter includes a reticle inspection station for inspecting the reticles, a plurality of input/output (I/O) load ports and a reticle handling robot for transferring the reticles between the stockers, the inspection station and the I/O load ports. The management system further includes a control unit for housing control electronics for the system.

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