Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1993-05-07
1995-05-23
Werner, Frank E.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414939, 414940, 414935, 414222, 414749, 414401, 414584, 414396, 104282, 198619, 118719, 20429825, B65G 4905
Patent
active
054175372
ABSTRACT:
An apparatus for transporting material, such as semiconductor wafers, between process modules coupled to a chamber. The transport apparatus includes a chamber; guide rails affixed to an outer surface of the chamber; one or more material transporters each including a motorized vehicle positioned outside the chamber and movable along the guide rails, a material carrier positioned inside the chamber, and magnetic levitation means for magnetically coupling the material carrier to the motorized vehicle through a nonmagnetic wall of the chamber; and a controller that controls the position of the motorized vehicle along the guide devices to move the material carrier to desired positions within the chamber.
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