Wafer transport module with rotatable and horizontally extendabl

Details Wafer transport module with rotatable and horizontally extendabl Wafer transport module with rotatable and horizontally extendabl

1992-12-23

1994-03-22

Schacher, Richard A.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414783, 414936, 414939, 414941, B65G 4906

Patent

active

052957772

ABSTRACT:
A wafer transport module interconnects a horizontal wafer handler with a vertical wafer processor and includes an evacuatable housing with a first port in communication with the horizontal wafer handler and sized to permit passage of a wafer therethrough in horizontal orientation and a second port in communication with a load/unload station of the vertical wafer processor and sized to permit passage of wafers therethrough in vertical orientation. The transport module includes a wafer holder which supports a wafer on a pedestal and rotates the pedestal and wafer about an inclined axis between horizontal orientation adjacent the first port and vertical orientation adjacent and in alignment with the second port. The wafer holder horizontally extends the vertically oriented platen and wafer from the second position through the second port to the load/unload station of the vertical processor. After wafer processing, the sequence is reversed to return the wafer to the horizontal wafer handler.

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