Imprint method, imprint apparatus, and process for producing...

Details Imprint method, imprint apparatus, and process for producing... Imprint method, imprint apparatus, and process for producing...

2006-10-11

2010-11-09

Vinh, Lan (Department: 1713)

Etching a substrate: processes

Masking of a substrate using material resistant to an etchant

Mechanically forming pattern into a resist

C216S041000, C430S300000

Reexamination Certificate

active

07828984

ABSTRACT:
An imprint method for imprinting an imprint pattern of a mold onto a pattern formation material on a substrate so as to realize a high throughput includes the steps of bringing the imprint pattern and the pattern formation material into contact with each other; applying a first pressure between the mold and the substrate to increase a contact area between the imprint pattern and the pattern formation material; and adjusting a positional relationship between the mold and the substrate at a second pressure lower than the first pressure.

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