Heat-transfer-stamp process for thermal imprint lithography

Details Heat-transfer-stamp process for thermal imprint lithography Heat-transfer-stamp process for thermal imprint lithography

2005-09-27

2005-09-27

Alanko, Anita (Department: 1765)

Etching a substrate: processes

Etching of semiconductor material to produce an article...

C216S009000, C216S022000, C216S041000, C216S049000, C216S052000, C264S320000, C977S726000

Reexamination Certificate

active

06949199

ABSTRACT:
A method of performing thermal imprint lithography of a surface of a thermoplastic layer-coated workpiece for forming a pattern therein comprises pre-heating the workpiece to a pre-selected high temperature prior to inserting the workpiece in a stamping/imprinting tool maintained at a predetermined lower temperature, whereby the interval for thermal cycling of the stamping/imprinting tool between higher and lower temperatures is eliminated or at least reduced. Applications of the method include forming servo patterns in disk-shaped substrates for hard disk recording media.

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