Systems and methods using an electrified projectile
Temperature cycling ceramic electrostatic chuck
Thermally conductive chuck for vacuum processor
Thin sheet air ionizer
Time-based wafer de-chucking from an electrostatic chuck...
Transfer humidity control device
Transformer device
Tri-polar electrostatic chuck
Triboelectric device
Tunable and aimable artificial lightening producing device
Tunable and aimable artificial lightening producing device
Unbalanced bipolar electrostatic chuck power supplies and method
Use of glow discharge in fluidized beds
Using coulomb forces to form 3-D reconfigurable antenna...
Using localized ionizer to reduce electrostatic charge from...
Vacuum compatible, deformable electrostatic chuck with high...
Vacuum plasma processor and method of operating same
Vacuum plasma processor and method of operating same
Variable high temperature chuck for high density plasma chemical
Versatile stun glove