Linear-rotary actuators and actuator systems
Linear/rotary actuator
Linearly displaceable precision table
Linearly moving or rotated flat armature for motor and pulling m
Lithographic apparatus and device manufacturing method
Lithographic apparatus and device manufacturing method
Lithographic apparatus and device manufacturing method
Lithographic apparatus and motor
Lithographic apparatus and motor for use in the apparatus
Lithographic apparatus and motor for use in the apparatus
Lithographic apparatus, coil assembly, positioning device...
Lithographic apparatus, Lorentz actuator, and device...
Long linear stroke reciprocating electric machine
Long stroke linear actuator
Long stroke linear voice coil actuator with the proportional...
Long-stroke voice coil linear actuator
Lorentz force actuator
Low backlash linear actuator
Low cost precision linear actuator and control system
Low leakage actuator for high performance