Lithographic apparatus and motor

Electrical generator or motor structure – Dynamoelectric – Linear

Reexamination Certificate

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Details

C310S015000, C310S017000, C355S053000

Reexamination Certificate

active

07459808

ABSTRACT:
A motor includes a magnet assembly to generate a magnetic field. The field includes along the first direction parts which are alternately orientated in the first and the second direction. The parts extend in a third direction which is perpendicular to the first and the second direction. The motor further includes a first coil winding to carry a first current. The first coil winding to extend in the first direction between parts of the magnetic field orientated in the second direction, to generate the force in the first direction. The motor also includes a second coil winding to carry a second current. The second coil winding to extend in the first direction between parts of the magnetic field substantially orientated in the first direction, to generate the force in the second direction.

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