Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2007-07-17

2007-07-17

Lam, Thanh (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C355S053000

Reexamination Certificate

active

10834359

ABSTRACT:
A lithographic projection apparatus includes a conduit shuttle used to at least partly support conduits which provide utilities to moveable objects. The conduit shuttle has an actuator which is positionable with six degrees of freedom. The actuator comprises a 2-phase or 3-phase motor with one degree of freedom and a Lorentz actuator with five degrees of freedom.

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patent: 2005/0168076 (2005-08-01), Hazelton

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