Lithographic apparatus, Lorentz actuator, and device...

Details Lithographic apparatus, Lorentz actuator, and device... Lithographic apparatus, Lorentz actuator, and device...

2006-12-05

2006-12-05

Nguyen, Tran (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

Reexamination Certificate

active

07145269

ABSTRACT:
A lithographic apparatus comprising a highly effective Lorentz actuator, is presented. The Lorentz actuator comprises a main magnet system and a subsidiary magnet system arranged in Halbach configuration, an electrically conductive element for producing a force via the interaction of an electric current carried by the electrically conductive element and a resulting field of the first and second magnetic field generated by the main and subsidiary magnet system, respectively. The actuator further comprises a magnetic element extending substantially between outer sides of the first and second magnet system subassemblies. The magnetic element guides a portion of the second, subsidiary field between the first and second magnet system subassemblies.

REFERENCES:
patent: 4758750 (1988-07-01), Itagaki et al.
patent: 6373153 (2002-04-01), Hazelton et al.
patent: 2003/0052548 (2003-03-01), Hol et al.
patent: 1 286 222 (2003-02-01), None
patent: 2003-88088 (2003-03-01), None
Machine language translation of European reference 2003088088 published Mar. 20, 2003, inventor Kawai Eiji.

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