Lithographic apparatus and motor for use in the apparatus

Details Lithographic apparatus and motor for use in the apparatus Lithographic apparatus and motor for use in the apparatus

2005-09-13

2005-09-13

Mullins, Burton (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S154280, C310S156430, C414S935000

Reexamination Certificate

active

06943464

ABSTRACT:
A Lorentz actuator provides a force between a first part and a second part of the apparatus, comprising a main magnet system, attached to a first part of the apparatus and providing a first magnetic field; a subsidiary magnet system, attached to the first part and arranged in a Halbach configuration, providing a second magnetic field; and an electrically conductive element attached to a second part of the apparatus and arranged so as to produce a force between the first and second parts of the apparatus by interaction of an electric current carried by the electrically conductive element and the combination of the first and second magnetic fields.

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