Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2006-02-14

2006-02-14

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C355S053000, C355S072000

Reexamination Certificate

active

06998737

ABSTRACT:
A magnetic field distribution for a planar motor is described. The magnetic field distribution can either be generated by means of permanent magnets or one or more current carrying conductor. The planar motor can be applied in a lithographic apparatus for displacing an object table along a first direction and a second direction perpendicular to the first direction. The particular arrangement of permanent magnets or current carrying conductor(s) may result in an improved efficiency of the planar motor in one of said first or second directions.

REFERENCES:
patent: 5808381 (1998-09-01), Aoyama et al.
patent: 6097114 (2000-08-01), Hazelton
patent: 6268667 (2001-07-01), Denne
patent: 6353271 (2002-03-01), Williams

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