Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2006-08-25

2008-09-02

Nguyen, Kiet T (Department: 2881)

Electrical generator or motor structure

Dynamoelectric

Linear

Reexamination Certificate

active

07420299

ABSTRACT:
A stage system for a lithographic apparatus is presented and includes a movable stage, and a stationary motor coil assembly including coils to interact with a magnet of the movable stage to thereby form a moving magnet motor to drive the stage. The stage system also includes a position measurement system to measure a position of the stage in a working area, the position measurement system to transfer a measurement beam along a measurement beam path which extends over a part of the motor coil assembly towards the stage. The coil assembly includes a coil assembly path between the motor coils to drive the motor, the coil assembly path extending below the measurement beam path. The stage may include a substrate stage or a reticle stage.

REFERENCES:
patent: 6184596 (2001-02-01), Ohzeki
patent: 6720680 (2004-04-01), Tanaka
patent: 7282821 (2007-10-01), Kubo et al.
patent: 2005/0255624 (2005-11-01), Miyajima

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