Lithographic apparatus, coil assembly, positioning device...

Details Lithographic apparatus, coil assembly, positioning device... Lithographic apparatus, coil assembly, positioning device...

2006-09-12

2006-09-12

Mullins, Burton (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C355S072000

Reexamination Certificate

active

07105955

ABSTRACT:
A coil assembly has at least two coils which are arranged in a common plane, and partially overlap in crossover sections of the coils. The crossover sections have a reduced height, which results in a reduced total height of the coil assembly. This leads to a more compact coil assembly, and hence to better dynamic characteristics of a positioning device in which the coil assembly is applied.

REFERENCES:
patent: 4767954 (1988-08-01), Phillips
patent: 4839543 (1989-06-01), Beakley et al.
patent: 6265793 (2001-07-01), Korenaga

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