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Gas processing apparatus for object to be processed

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Gas processing apparatus for object to be processed

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Gas providing member and processing device

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Gas reaction system and semiconductor processing apparatus

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Gas recovery unit

Coating apparatus – Gas or vapor deposition
Patent

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Gas recovery unit utilizing dual use of gas

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas scavenger

Coating apparatus – Gas or vapor deposition
Patent

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Gas seal for continuous chemical vapor deposition reactors

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Gas shower unit for semiconductor manufacturing apparatus...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Gas spray arm for spin coating apparatus

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Gas supply apparatus and film forming apparatus

Coating apparatus – Intercontrol or safety interlock
Reexamination Certificate

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Gas supply device, particularly for manufacturing semiconductor

Coating apparatus – Solid member or material acting on coating after application – Running length work
Patent

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Gas supply system for a powder-fluidizing apparatus

Coating apparatus – Program – cyclic – or time control – Having timer
Reexamination Certificate

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Gas supply system for a powder-fluidizing apparatus

Coating apparatus – Program – cyclic – or time control – Having timer
Reexamination Certificate

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Gas supply system, substrate processing apparatus and gas...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas supplying apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Gas supplying apparatus and vapor-phase growth plant

Coating apparatus – Gas or vapor deposition
Patent

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Gas supplying head and load lock chamber of semiconductor proces

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Gas treatment apparatus

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas treatment apparatus

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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