Gas supply system, substrate processing apparatus and gas...

Details Gas supply system, substrate processing apparatus and gas... Gas supply system, substrate processing apparatus and gas...

2011-03-01

2011-03-01

Kackar, Ram N (Department: 1716)

Coating apparatus

Gas or vapor deposition

C118S696000, C118S708000, C156S345260, C700S121000

Reexamination Certificate

active

07896967

ABSTRACT:
A gas supply system for supplying a gas into a processing chamber for processing a substrate to be processed includes: a processing gas supply unit; a processing gas supply line; a first and a second branch line; a branch flow control unit; an additional gas supply unit; an additional gas supply line; and a control unit. The control unit performs, before processing the substrate to be processed, a processing gas supply control and an additional gas supply control by using the processing gas supply unit and the additional gas supply unit, respectively, wherein the additional gas supply control includes a control that supplies the additional gas at an initial flow rate greater than a set flow rate and then at the set flow rate after a lapse of a period of time.

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patent: WO2004109420 (2004-12-01), None

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