Gas providing member and processing device

Details Gas providing member and processing device Gas providing member and processing device

2006-03-13

2009-12-15

Hassanzadeh, Parviz (Department: 1792)

Coating apparatus

Gas or vapor deposition

Work support

C118S715000, C156S345330, C156S345340

Reexamination Certificate

active

07632356

ABSTRACT:
A gas providing member includes a body portion which forms a gas providing passage between the body portion and a processing member which holds the processing target, and the gas providing passage provides gas onto a processing target. In the body portion, a gas reservoir portion located in the gas providing passage is formed.

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patent: 0 698 674 (1996-02-01), None
patent: 1 167 573 (2002-01-01), None
patent: 2002-093894 (2002-03-01), None
patent: 99/56307 (1999-11-01), None

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