Gas supply device, particularly for manufacturing semiconductor

Details Gas supply device, particularly for manufacturing semiconductor Gas supply device, particularly for manufacturing semiconductor

1985-11-29

1987-06-16

Lawrence, Evan K.

Coating apparatus

Solid member or material acting on coating after application

Running length work

118500, 118728, B05C 1302

Patent

active

046729151

ABSTRACT:
A device for supplying gases to a perforated vessel, particularly a boat or boats for processing semiconductor elements by their exposure to the gases, comprises at least one tubular perforated gas manifold disposed under the perforated part of the boat and supported on a manifold raiser. The vessel is supported on two cylindrical support members which closely abut the boat and the manifolds which in turn abut the manifold raiser along the working length of the boat and the supporting members. A relatively small gas expansion cavity is thereby created between the manifold(s) and the boat which improves the manufacturing process.

REFERENCES:
patent: 4466381 (1984-08-01), Jenkins

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