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Method and apparatus for improved coating of a semiconductor waf

Coating apparatus – With means to centrifuge work
Patent

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Method and apparatus for manufacturing disc-shaped recording med

Coating apparatus – With means to centrifuge work
Patent

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Method and apparatus for producing cover layers in Blu-ray...

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Method and apparatus for spin coating

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Method and device for providing a layer of coating material...

Coating apparatus – With means to centrifuge work – Coating inside of hollow work
Reexamination Certificate

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Method for coating inner surfaces of metal tubes with powdery pa

Coating apparatus – With means to centrifuge work – Coating inside of hollow work
Patent

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Method of forming coating film and apparatus therefor

Coating apparatus – With means to centrifuge work
Patent

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Microscope slide centrifuge

Coating apparatus – With means to centrifuge work
Patent

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Multi-port chemical dispense

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Multistage spin type substrate processing system

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Novel resist spinning head

Coating apparatus – With means to centrifuge work
Patent

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On track coater unit cup set

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Parts coating apparatus and method

Coating apparatus – With means to centrifuge work
Patent

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Photoresist application for a circlet wafer

Coating apparatus – With means to centrifuge work
Patent

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Photoresist coater

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Planarization process using artificial gravity

Coating apparatus – With means to centrifuge work
Patent

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Plasma deposition of spin chucks to reduce contamination of...

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Processing apparatus having parts for thermal and non-thermal tr

Coating apparatus – With means to centrifuge work
Patent

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Producing cover layers in optical discs

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Recirculation spin coater with optical controls

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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