4. Coating apparatus
  5. With means to centrifuge work
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Parts coating apparatus and method

Coating apparatus – With means to centrifuge work
Patent

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Photoresist application for a circlet wafer

Coating apparatus – With means to centrifuge work
Patent

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Photoresist coater

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Planarization process using artificial gravity

Coating apparatus – With means to centrifuge work
Patent

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Plasma deposition of spin chucks to reduce contamination of...

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Processing apparatus having parts for thermal and non-thermal tr

Coating apparatus – With means to centrifuge work
Patent

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Producing cover layers in optical discs

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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