Coating apparatus – With means to centrifuge work
Reexamination Certificate
2007-08-23
2010-12-28
Hassanzadeh, Parviz (Department: 1716)
Coating apparatus
With means to centrifuge work
C118S320000
Reexamination Certificate
active
07856939
ABSTRACT:
A recirculation spin coater system includes a spin coating bowl with a having a recirculation drain and a wetting fluid chamber associated with the upper end of the inner side walls wherein the wetting fluid chamber is configured to dispense a side wall wetting fluid to inner side walls of the spin coating bowl. A vision system configured to capture images of the work piece within the spin coating bowl for quality control and work piece positioning. An annular array of light sources are surrounding sides of the spin coating bowl and are configured to illuminate the interior of the spin coating bowl for optical controls. The vision system may be utilized for both quality control and work piece positioning. The coating nozzle is configured to move between a first coating position vertically aligned with the work piece, and a second purge position vertically aligned with the recirculation drain.
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Minor Lawrence M.
Nguyen Hung
Susie Steve R.
Titolo Lisa Marie
Altman Deborah M.
Hassanzadeh Parviz
Hilton Albert
Transitions Optical Inc.
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