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Adaptive electrostatic pin chuck

Chucks or sockets – With magnetic or electrostatic means
Reexamination Certificate

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Ceramic electrostatic wafer chuck

Chucks or sockets – With magnetic or electrostatic means
Patent

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Chucking apparatus and production method for the same

Chucks or sockets – With magnetic or electrostatic means
Reexamination Certificate

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Device for application of mechanical and magnetic forces to a fi

Chucks or sockets – With magnetic or electrostatic means
Patent

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Electrostatic chuck

Chucks or sockets – With magnetic or electrostatic means
Patent

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Electrostatic chuck

Chucks or sockets – With magnetic or electrostatic means
Patent

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Electrostatic chuck

Chucks or sockets – With magnetic or electrostatic means
Patent

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Electrostatic chuck

Chucks or sockets – With magnetic or electrostatic means
Patent

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Elements for a magnetic tool holder system

Chucks or sockets – With magnetic or electrostatic means
Reexamination Certificate

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Lift pin impact management

Chucks or sockets – With magnetic or electrostatic means
Reexamination Certificate

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Magnetic chuck assembly

Chucks or sockets – With magnetic or electrostatic means
Patent

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Plasma processing apparatus and focus ring

Chucks or sockets – With magnetic or electrostatic means
Reexamination Certificate

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Reversible micromachining locator

Chucks or sockets – With magnetic or electrostatic means
Patent

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