Electrostatic chuck

Details Electrostatic chuck Electrostatic chuck

1991-12-18

1993-05-25

Bishop, Steven C.

Chucks or sockets

With magnetic or electrostatic means

269 8, 361234, H02N 1300

Patent

active

052133494

ABSTRACT:
An electrostatic chuck for clamping a substrate during manufacture thereof. The chuck has an electrostatic plate and a support therefor. The electrostatic plate has a top surface, which contacts the substrate, and which has an inner coil portion and an outer coil portion for connection to a DC source for forming an electric field. Heat in the substrate is removed by the plate. The plate has a plurality of selectively placed chambers and passages for removing heat by gas circulation therethrough.

REFERENCES:
patent: 4184188 (1980-01-01), Briglia
patent: 4502094 (1985-02-01), Lewin et al.
patent: 4520421 (1985-05-01), Sakitani et al.
patent: 4864461 (1989-09-01), Kasahara
patent: 4999507 (1991-03-01), Clemens et al.
patent: 5055964 (1991-10-01), Logan et al.

Affiliated with

Also associated with

Rating

Electrostatic chuck does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrostatic chuck, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrostatic chuck will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-893191