Electrostatic chuck

Details Electrostatic chuck Electrostatic chuck

1993-01-11

1994-06-28

Bishop, Steven C.

Chucks or sockets

With magnetic or electrostatic means

269 8, 361234, B25B 1100, H01F 1502

Patent

active

053240537

ABSTRACT:
An improvement is proposed in an electrostatic chuck having a chuck head comprising an electrode layer sandwiched between a backing insulating layer and a frontal insulating layer, which comes into contact with a work piece when the electrostatic chuck is working, by which the electrostatic chuck can exhibit a large electrostatic attractive force by increasing the voltage applied between the electrodes without the problem of dielectric breakdown in the insulating layer and a leak current occurring on the surface of the work piece. The improvement can be obtained by forming the frontal insulating layer in a two-layered structure consisting of a high-dielectric layer made from a material having a dielectric constant of at least 50 at a temperature of 20.degree. C. and a frequency of 1 MHz and a high-resistivity layer made from a material having a volume resistivity of at least 1.times.10.sup.12 ohm.cm at 20.degree. C., the high-dielectric layer being interposed between the electrode layer and the high-resistivity layer.

REFERENCES:
patent: 4480284 (1984-10-01), Tojo et al.

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