Adaptive electrostatic pin chuck

Details Adaptive electrostatic pin chuck Adaptive electrostatic pin chuck

2007-04-03

2007-04-03

Carter, Monica (Department: 3722)

Chucks or sockets

With magnetic or electrostatic means

C361S234000, C118S500000, C118S730000, C451S398000, C029S407050

Reexamination Certificate

active

10605773

ABSTRACT:
Disclosed is an electrostatic chuck and system for maintaining a device flat within the electrostatic chuck. The electrostatic chuck has a plate, height adjustment mechanisms connected to the plate; and electrostatic chuck pins connected to the height adjustment mechanisms. The system provides a measurement tool adapted to measure the flatness of the device held by the electrostatic chuck pins and a computer connected to the height adjustment mechanisms and the measurement tool. The computer adjusts the flatness of the device by adjusting the height adjustment mechanisms based on feedback from the measurement tool. The computer is adapted to change the shape of the device to conform to a pre-existing standard.

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