Rotary vacuum-chuck with water-assisted labyrinth seal
Self aligning vacuum nozzle
Semiconductor wafer carrier and method
Semiconductor wafer chuck with built-in standoff for contactless
Spinner chuck
Spinning plate for substrates
System and method for optimizing wafer flatness at high...
Vacuum chuck
Vacuum chuck utilizing sintered material and method of...
Vacuum chuck with venturi jet for converting positive pressure t
Vacuum collet with release filament
Vacuum holder for integrated circuit units