Vacuum holder for integrated circuit units

Details Vacuum holder for integrated circuit units Vacuum holder for integrated circuit units

2005-07-19

2009-06-02

Pert, Evan (Department: 2826)

Chucks or sockets

Vacuum

Reexamination Certificate

active

07540503

ABSTRACT:
A support device for supporting a set of integrated circuit units (65), the device comprising: a support member having a metal surface, said surface having an array of recesses (27); a soft material layer, overlaying the recesses of the metal surface so as to protect the units (65) from damage caused by contact with the metal surface, and; a vacuum means (35) in communication with said recesses (27), such that the vacuum means supports each unit within a respective recess, wherein the soft material layer is formed of a plurality of independent inserts (40), each insert engageable with at least one recess using engagement means (50, 55) for engaging each insert (40) with the at least one recess (27).

REFERENCES:
patent: 5374829 (1994-12-01), Sakamoto et al.
patent: 5882055 (1999-03-01), Smith
patent: 5953590 (1999-09-01), Piper et al.
patent: 6196532 (2001-03-01), Otwell
patent: 0 456 426 (1991-11-01), None

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