Semiconductor wafer carrier and method

Details Semiconductor wafer carrier and method Semiconductor wafer carrier and method

1994-03-24

1995-06-13

Bishop, Steven C.

Chucks or sockets

Vacuum

269 21, 451289, 451388, B25D 1100

Patent

active

054235588

ABSTRACT:
An improved semiconductor wafer carrier provides gimballing motion of the wafer to dynamically align the wafer to a polishing platen. This gimballing motion is achieved by providing a conical receptacle which has a spring friction fit with a spherical button. A torque plate with spring fingers provides the spring friction fit between the conical receptacle on the rotating shaft and the spherical button on the drive plate of the wafer carrier.

REFERENCES:
patent: 3711081 (1973-01-01), Cachon
patent: 3833230 (1974-09-01), Noll
patent: 4194324 (1980-03-01), Bonora et al.
patent: 5172922 (1992-12-01), Kowalwski et al.

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